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Stability analysis in high-order electromechanical sigma-delta accelerometer

  • Yuntao Liu*
  • , Xiaowei Liu
  • , Weiping Chen
  • , Qun Wu
  • *Corresponding author for this work
  • College of Information and Communication Engineering, Harbin Engineering University
  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A nonlinearity model including distortion components for sigma-delta (ΣΔ) accelerometer that allows stability analysis is described. Based on this model, closed-loop stability and signal dependent stability are analyzed detailedly. To verify the conclusions, Matlab/Simulink model for a fourth-order ΣΔ accelerometer is designed. The simulation results indicate that high-order system needs a large compensation coefficient, and it will not affect the performance due to the very high low-frequency gain of the loop filter. High-order system is conditionally stable, and stability is affected by the input signal.

Original languageEnglish
Title of host publicationMEMS/NEMS Nano Technology
PublisherTrans Tech Publications Ltd
Pages716-720
Number of pages5
ISBN (Print)9783037851753
DOIs
StatePublished - 2011

Publication series

NameKey Engineering Materials
Volume483
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Keywords

  • Accelerometer
  • High-order
  • Sigma-delta
  • Stability

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