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Spectral Characteristics of DC Short Glow Discharge Plasma With Grid Electrodes

  • School of Physics, Harbin Institute of Technology
  • Heilongjiang Provincial Key Laboratory of Plasma Physics and Application Technology
  • Institute of Laser Physics Sb Ras
  • St. Petersburg State University

Research output: Contribution to journalArticlepeer-review

Abstract

The characteristics of post-cathode plasma maintained by a self-made DC short glow-discharge plasma generator with grid electrodes were measured by optical emission spectroscopy. The discharge existed in an abnormal glow discharge mode at a voltage of 250-400 V and a helium pressure of 3-15 Torr and a discharge gap of 3 mm. The results indicate that the intensity distribution of helium atom spectral lines in the post-cathode space differs from that in the post-anode space. The temperature of electron excitation in the post-cathode plasma reaches its peak of 1500-3000K at 5-6 mm from the grid cathode. The difference in the intensity distributions of helium atom spectral lines in the post-cathode and post-anode spaces is associated with electron generation mechanism in these cases.

Original languageEnglish
Pages (from-to)19339-19346
Number of pages8
JournalIEEE Access
Volume11
DOIs
StatePublished - 2023
Externally publishedYes

Keywords

  • Glow discharge
  • effective thickness of plasma
  • grid anode
  • post-anode plasma
  • spectral characteristics

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