Abstract
The characteristics of post-cathode plasma maintained by a self-made DC short glow-discharge plasma generator with grid electrodes were measured by optical emission spectroscopy. The discharge existed in an abnormal glow discharge mode at a voltage of 250-400 V and a helium pressure of 3-15 Torr and a discharge gap of 3 mm. The results indicate that the intensity distribution of helium atom spectral lines in the post-cathode space differs from that in the post-anode space. The temperature of electron excitation in the post-cathode plasma reaches its peak of 1500-3000K at 5-6 mm from the grid cathode. The difference in the intensity distributions of helium atom spectral lines in the post-cathode and post-anode spaces is associated with electron generation mechanism in these cases.
| Original language | English |
|---|---|
| Pages (from-to) | 19339-19346 |
| Number of pages | 8 |
| Journal | IEEE Access |
| Volume | 11 |
| DOIs | |
| State | Published - 2023 |
| Externally published | Yes |
Keywords
- Glow discharge
- effective thickness of plasma
- grid anode
- post-anode plasma
- spectral characteristics
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