Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements

Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad.