Abstract
The characteristics of the electron energy in a microwave atmospheric-pressure argon microplasma are investigated by a spatially resolved optical emission spectroscopy. By adding tiny amount of xenon (<1 ppm) as tracer gas into the argon discharge, it is found that the spatial distribution of the electrons with energy >8.3 eV is quite different from that of the electrons with energy >11.5 eV. Spatial distribution of the population ratio between 4p and 5p levels of Ar atom is also determined. Furthermore, with a collisional-radiative model, it is found that the spatial variation of this population ratio is mainly attributed to the spatial nonuniformity of the effective electron temperature.
| Original language | English |
|---|---|
| Article number | 151502 |
| Journal | Applied Physics Letters |
| Volume | 94 |
| Issue number | 15 |
| DOIs | |
| State | Published - 2009 |
| Externally published | Yes |
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