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Spatial nonuniformity of electron energy in a microwave atmospheric-pressure microplasma

  • Li Guo Zhu
  • , Zhi Bo Zhang
  • , Xi Ming Zhu
  • , Yi Kang Pu*
  • , Ze Ren Li
  • *Corresponding author for this work
  • Tsinghua University
  • China Academy of Engineering Physics
  • Tufts University

Research output: Contribution to journalArticlepeer-review

Abstract

The characteristics of the electron energy in a microwave atmospheric-pressure argon microplasma are investigated by a spatially resolved optical emission spectroscopy. By adding tiny amount of xenon (<1 ppm) as tracer gas into the argon discharge, it is found that the spatial distribution of the electrons with energy >8.3 eV is quite different from that of the electrons with energy >11.5 eV. Spatial distribution of the population ratio between 4p and 5p levels of Ar atom is also determined. Furthermore, with a collisional-radiative model, it is found that the spatial variation of this population ratio is mainly attributed to the spatial nonuniformity of the effective electron temperature.

Original languageEnglish
Article number151502
JournalApplied Physics Letters
Volume94
Issue number15
DOIs
StatePublished - 2009
Externally publishedYes

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