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Soft X-ray-charged multilayered piezoelectret with embedded electrode for push-button energy harvesting

  • Jia Lu
  • , Yuji Suzuki*
  • *Corresponding author for this work
  • The University of Tokyo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this report, we propose a push-button-type kinetic energy harvester using a soft-X-ray-charged multilayered piezoelectret. With the aid of embedded electrodes, the bias voltage is directly applied to each unit cell. With our 9-layer early prototype, output power of 9.9 μJ has been obtained for 0.75 mm displacement within 0.3 s. d33 as high as 14000 pC/N is realized, which is 10 times higher than that for previous piezoelectrets. Power generation by pushing with a finger has also been demonstrated.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages646-648
Number of pages3
ISBN (Electronic)9781538647820
DOIs
StatePublished - 24 Apr 2018
Externally publishedYes
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/TerritoryUnited Kingdom
CityBelfast
Period21/01/1825/01/18

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