TY - GEN
T1 - Single neuron adaptive PID control of the silicon-based integrated micro nano-positioning XY-stage
AU - Jiachou, Wang
AU - Weibin, Rong
AU - Lining, Sun
AU - Xinxin, Li
PY - 2009
Y1 - 2009
N2 - An integrated micro xy-stage is designed and fabricated for application in nanometer-scale operation and nanometric positioning precision. This device integrates the functions of both actuating and sensing in the same silicon ship and is mainly composed of a silicon-based xy-stage, electrostatics comb actuator and a displacement sensor. In this paper a robust control strategy based on single neuron adaptive PID control theory is developed for silicon-based xy-stage, considering electrical, mechanical, and stiffness models. Single neuron adaptive PID control enables compact realization of a robust controller tolerant of device characteristics variation, types of inherent instabilities, and improving dynamical characteristics. The experimental results verified that the controller is more suitable for the silicon integrated micro xy-stage, under which the settling time is less than 2.5ms and the repeatability error is better than ±24.9nm. In addition, the presented control scheme is simple to implement in practical application.
AB - An integrated micro xy-stage is designed and fabricated for application in nanometer-scale operation and nanometric positioning precision. This device integrates the functions of both actuating and sensing in the same silicon ship and is mainly composed of a silicon-based xy-stage, electrostatics comb actuator and a displacement sensor. In this paper a robust control strategy based on single neuron adaptive PID control theory is developed for silicon-based xy-stage, considering electrical, mechanical, and stiffness models. Single neuron adaptive PID control enables compact realization of a robust controller tolerant of device characteristics variation, types of inherent instabilities, and improving dynamical characteristics. The experimental results verified that the controller is more suitable for the silicon integrated micro xy-stage, under which the settling time is less than 2.5ms and the repeatability error is better than ±24.9nm. In addition, the presented control scheme is simple to implement in practical application.
KW - MEMS
KW - Sensor
KW - Silicon-based integrated micro xy-stage
KW - Single neuron adaptive PID
UR - https://www.scopus.com/pages/publications/71849106137
M3 - 会议稿件
AN - SCOPUS:71849106137
SN - 0878493395
SN - 9780878493395
T3 - Advanced Materials Research
SP - 207
EP - 212
BT - Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT
T2 - Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT
Y2 - 19 November 2008 through 22 November 2008
ER -