Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity

Kang Liu; Bing Dai; Victor Ralchenko; Yuanqin Xia; Baogang Quan; Jiwen Zhao; Guoyang Shu; Mingqi Sun; Ge Gao; Lei Yang; Pei Lei; Jiecai Han; Jiaqi Zhu

doi:10.1016/j.sna.2017.01.027

Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity

Kang Liu
, Bing Dai
, Victor Ralchenko
, Yuanqin Xia
, Baogang Quan
, Jiwen Zhao
, Guoyang Shu
, Mingqi Sun
, Ge Gao
, Lei Yang
, Pei Lei
, Jiecai Han
, Jiaqi Zhu^*

^*Corresponding author for this work

School of Astronautics

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Abstract

An ultraviolet (UV) detector on single crystal chemical vapor deposition (CVD) diamond with three-dimensional (3D) metal electrodes, is designed, and fabricated with the aim to improve collection efficiency of photo-induced carriers. Interdigitated Ti/Au electrodes were formed within 10 μm deep groove etched in diamond to ensure a more uniform field pattern in the diamond bulk. In the preliminary tests the groove-shaped 3D device performance was compared to a detector with a conventional planar structure on the same material at applied electric field of 1 V/μm. It is found that the responsivity of the 3D electrode structure in the spectral range of 220–280 nm is up to 50% higher than that for the planar structure.

Original language	English
Pages (from-to)	121-126
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	259
DOIs	https://doi.org/10.1016/j.sna.2017.01.027
State	Published - 1 Jun 2017

Keywords

3D electrodes
Photoresponse
Single crystal diamond
UV detector

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10.1016/j.sna.2017.01.027

Cite this

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title = "Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity",

abstract = "An ultraviolet (UV) detector on single crystal chemical vapor deposition (CVD) diamond with three-dimensional (3D) metal electrodes, is designed, and fabricated with the aim to improve collection efficiency of photo-induced carriers. Interdigitated Ti/Au electrodes were formed within 10 μm deep groove etched in diamond to ensure a more uniform field pattern in the diamond bulk. In the preliminary tests the groove-shaped 3D device performance was compared to a detector with a conventional planar structure on the same material at applied electric field of 1 V/μm. It is found that the responsivity of the 3D electrode structure in the spectral range of 220–280 nm is up to 50\% higher than that for the planar structure.",

keywords = "3D electrodes, Photoresponse, Single crystal diamond, UV detector",

author = "Kang Liu and Bing Dai and Victor Ralchenko and Yuanqin Xia and Baogang Quan and Jiwen Zhao and Guoyang Shu and Mingqi Sun and Ge Gao and Lei Yang and Pei Lei and Jiecai Han and Jiaqi Zhu",

note = "Publisher Copyright: {\textcopyright} 2017",

year = "2017",

month = jun,

day = "1",

doi = "10.1016/j.sna.2017.01.027",

language = "英语",

volume = "259",

pages = "121--126",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity

AU - Liu, Kang

AU - Dai, Bing

AU - Ralchenko, Victor

AU - Xia, Yuanqin

AU - Quan, Baogang

AU - Zhao, Jiwen

AU - Shu, Guoyang

AU - Sun, Mingqi

AU - Gao, Ge

AU - Yang, Lei

AU - Lei, Pei

AU - Han, Jiecai

AU - Zhu, Jiaqi

PY - 2017/6/1

Y1 - 2017/6/1

N2 - An ultraviolet (UV) detector on single crystal chemical vapor deposition (CVD) diamond with three-dimensional (3D) metal electrodes, is designed, and fabricated with the aim to improve collection efficiency of photo-induced carriers. Interdigitated Ti/Au electrodes were formed within 10 μm deep groove etched in diamond to ensure a more uniform field pattern in the diamond bulk. In the preliminary tests the groove-shaped 3D device performance was compared to a detector with a conventional planar structure on the same material at applied electric field of 1 V/μm. It is found that the responsivity of the 3D electrode structure in the spectral range of 220–280 nm is up to 50% higher than that for the planar structure.

AB - An ultraviolet (UV) detector on single crystal chemical vapor deposition (CVD) diamond with three-dimensional (3D) metal electrodes, is designed, and fabricated with the aim to improve collection efficiency of photo-induced carriers. Interdigitated Ti/Au electrodes were formed within 10 μm deep groove etched in diamond to ensure a more uniform field pattern in the diamond bulk. In the preliminary tests the groove-shaped 3D device performance was compared to a detector with a conventional planar structure on the same material at applied electric field of 1 V/μm. It is found that the responsivity of the 3D electrode structure in the spectral range of 220–280 nm is up to 50% higher than that for the planar structure.

KW - 3D electrodes

KW - Photoresponse

KW - Single crystal diamond

KW - UV detector

UR - https://www.scopus.com/pages/publications/85017259074

U2 - 10.1016/j.sna.2017.01.027

DO - 10.1016/j.sna.2017.01.027

M3 - 文章

AN - SCOPUS:85017259074

SN - 0924-4247

VL - 259

SP - 121

EP - 126

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

Single crystal diamond UV detector with a groove-shaped electrode structure and enhanced sensitivity

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Keywords

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