@inproceedings{8a19a87afda24fd6a87998566cf5ab69,
title = "Simultaneous Measurement of Relative Humidity and Temperature Based on Internal-external Cavity Vernier effect in Cascaded Fabry–P{\'e}rot Interferometer",
abstract = "A multi-beam interference theory called internal-external cavity Vernier effect in cascaded Fabry–P{\'e}rot interferometer (FPI) was proposed and analyzed. Through that theory, simultaneous measurement of relative humidity (RH) and temperature could be achieved. The cascaded FPI consists of an air cavity and a chitosan cavity. The envelope of the spectrum of the proposed sensor can restore the information of the chitosan cavity, and the high frequency fringe is the sum of the information of the two cavities. By tracing the wavelength shifts of the envelope and high-frequency fringes, a sensitivity coefficient (SC) matrix of the relatively humidity (RH) and temperature could be obtained. The experimental RH sensitivities for the envelope and high-frequency fringe were 1.599 nm/\%RH and 0.071 nm/\%RH, respectively. Temperature sensitivities of -0.045 nm/℃and 0.035/℃ were obtained for the envelope and high-frequency fringe, respectively. The crosstalk between the RH and temperature was eliminated by the SC. This Vernier effect provides a dual-parameter measurement function and explains the multi-beam interference in cascaded FPI.",
keywords = "Vernier effect, internal-external cavity Vernier effect, relative humidity sensor, simultaneous measurement",
author = "Cheng Zhou and Jiajun Tian and Yong Yao",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE. All rights reserved.; 3rd International Conference on Optics and Image Processing, ICOIP 2023 ; Conference date: 14-04-2023 Through 16-04-2023",
year = "2023",
doi = "10.1117/12.2689102",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Bingxiang Li and Chao Ren",
booktitle = "Third International Conference on Optics and Image Processing, ICOIP 2023",
address = "美国",
}