Simulation of surface modification of long shaft by DC ion implantation

Surface modification of a long shaft by DC ion implantation was mathematically modeled on the basis of particle-in-cell scheme, and numerically simulated with software package Matlab. The influence of the ion implantation conditions, especially the shaft-grid distance, shaft's radius and bias voltage, and ion species, on the implanted area and implantation angle was evaluated. The results show that the shaft-grid distance and shaft's radius have a major impact on the implantation dynamics. For instance, as the distance increases, both the implanted area and implantation angle decrease; and a reduced shaft radius results in an increase of implantation area and a stronger fluctuation of implantation angle. Besides, the shaft's bias voltage and ion species weakly affect the ion trajectory, implantation angle and positions.