Simulation of a diamond-shaped target with different sizes in plasma based ion implantation

In this paper, plasma based ion implantation of a diamond-shaped target was simulated using a fluid dynamic model for three different sizes. The effects of the target size on plasma sheath evolution and the implanted ion parameters have been studied. It was found that a larger sized target would result in a faster sheath expansion, and better conformity between the sheath and the target. For all three cases, the ion implanting dose peaked near the corner and decreased at the corner, reminiscent of the sheath characteristic around an independent corner.