Silicon nanomembranes for high performance flexible photonic interconnects and devices

Harish Subbaraman; Xiaochuan Xu; Nassibe Rahimi; Amir Hosseini; Ray T. Chen

doi:10.1117/12.906852

Silicon nanomembranes for high performance flexible photonic interconnects and devices

Harish Subbaraman^*
, Xiaochuan Xu
, Nassibe Rahimi
, Amir Hosseini
, Ray T. Chen

^*Corresponding author for this work

Omega Optics Inc.
University of Texas at Austin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we demonstrate the practicality of using silicon nanomembranes for use in high performance flexible photonic interconnects and devices. Using two silicon nanomembrane transfer schemes, we demonstrate successful transfer of several photonic building blocks including large aspect ratio ( _gt;4000) and long (>5cm) strip waveguides, band engineered slow light (n _g > 30) photonic crystal waveguides, 1xN (1x2 and 1x6) multimode interference couplers etc, on a flexible Kapton polyimide substrate. A two-step cleaving method is also developed and implemented to facilitate testing of the transferred flexible photonic components for the first time. Upon cleaving, the propagation loss in transferred ultralong strip waveguide (∼5.7cm) is found to be 1.1dB/cm, which is comparable to that of waveguides on SOI..

Original language	English
Title of host publication	Optoelectronic Interconnects XII
DOIs	https://doi.org/10.1117/12.906852
State	Published - 2012
Externally published	Yes
Event	Optoelectronic Interconnects XII - San Francisco, CA, United States Duration: 23 Jan 2012 → 25 Jan 2012

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8267
ISSN (Print)	0277-786X

Conference

Conference	Optoelectronic Interconnects XII
Country/Territory	United States
City	San Francisco, CA
Period	23/01/12 → 25/01/12

Keywords

Flexible photonics
Multimode interference couplers
Photonic crystal waveguides
Silicon nanomembranes
Silicon-on-insulator
Slow light
True time delay

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10.1117/12.906852

Cite this

@inproceedings{0f989a45033a4e8da3b8d800ffda4f8c,

title = "Silicon nanomembranes for high performance flexible photonic interconnects and devices",

abstract = "In this paper, we demonstrate the practicality of using silicon nanomembranes for use in high performance flexible photonic interconnects and devices. Using two silicon nanomembrane transfer schemes, we demonstrate successful transfer of several photonic building blocks including large aspect ratio ( gt;4000) and long (>5cm) strip waveguides, band engineered slow light (n g > 30) photonic crystal waveguides, 1xN (1x2 and 1x6) multimode interference couplers etc, on a flexible Kapton polyimide substrate. A two-step cleaving method is also developed and implemented to facilitate testing of the transferred flexible photonic components for the first time. Upon cleaving, the propagation loss in transferred ultralong strip waveguide (∼5.7cm) is found to be 1.1dB/cm, which is comparable to that of waveguides on SOI..",

keywords = "Flexible photonics, Multimode interference couplers, Photonic crystal waveguides, Silicon nanomembranes, Silicon-on-insulator, Slow light, True time delay",

author = "Harish Subbaraman and Xiaochuan Xu and Nassibe Rahimi and Amir Hosseini and Chen, \{Ray T.\}",

year = "2012",

doi = "10.1117/12.906852",

language = "英语",

isbn = "9780819489104",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Optoelectronic Interconnects XII",

note = "Optoelectronic Interconnects XII ; Conference date: 23-01-2012 Through 25-01-2012",

}

Subbaraman, H, Xu, X, Rahimi, N, Hosseini, A & Chen, RT 2012, Silicon nanomembranes for high performance flexible photonic interconnects and devices. in Optoelectronic Interconnects XII., 82670H, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8267, Optoelectronic Interconnects XII, San Francisco, CA, United States, 23/01/12. https://doi.org/10.1117/12.906852

Silicon nanomembranes for high performance flexible photonic interconnects and devices. / Subbaraman, Harish; Xu, Xiaochuan; Rahimi, Nassibe et al.
Optoelectronic Interconnects XII. 2012. 82670H (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8267).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Silicon nanomembranes for high performance flexible photonic interconnects and devices

AU - Subbaraman, Harish

AU - Xu, Xiaochuan

AU - Rahimi, Nassibe

AU - Hosseini, Amir

AU - Chen, Ray T.

PY - 2012

Y1 - 2012

N2 - In this paper, we demonstrate the practicality of using silicon nanomembranes for use in high performance flexible photonic interconnects and devices. Using two silicon nanomembrane transfer schemes, we demonstrate successful transfer of several photonic building blocks including large aspect ratio ( gt;4000) and long (>5cm) strip waveguides, band engineered slow light (n g > 30) photonic crystal waveguides, 1xN (1x2 and 1x6) multimode interference couplers etc, on a flexible Kapton polyimide substrate. A two-step cleaving method is also developed and implemented to facilitate testing of the transferred flexible photonic components for the first time. Upon cleaving, the propagation loss in transferred ultralong strip waveguide (∼5.7cm) is found to be 1.1dB/cm, which is comparable to that of waveguides on SOI..

AB - In this paper, we demonstrate the practicality of using silicon nanomembranes for use in high performance flexible photonic interconnects and devices. Using two silicon nanomembrane transfer schemes, we demonstrate successful transfer of several photonic building blocks including large aspect ratio ( gt;4000) and long (>5cm) strip waveguides, band engineered slow light (n g > 30) photonic crystal waveguides, 1xN (1x2 and 1x6) multimode interference couplers etc, on a flexible Kapton polyimide substrate. A two-step cleaving method is also developed and implemented to facilitate testing of the transferred flexible photonic components for the first time. Upon cleaving, the propagation loss in transferred ultralong strip waveguide (∼5.7cm) is found to be 1.1dB/cm, which is comparable to that of waveguides on SOI..

KW - Flexible photonics

KW - Multimode interference couplers

KW - Photonic crystal waveguides

KW - Silicon nanomembranes

KW - Silicon-on-insulator

KW - Slow light

KW - True time delay

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M3 - 会议稿件

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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T2 - Optoelectronic Interconnects XII

Y2 - 23 January 2012 through 25 January 2012

ER -

Silicon nanomembranes for high performance flexible photonic interconnects and devices

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Keywords

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