@inproceedings{d4c5bbf5ab2c40febf26a736eaf8cad4,
title = "Silicon nanomembrane based photonic devices on foreign substrates",
abstract = "We demonstrate transferring 2cm × 2cm unpatterned nanomembrane onto glass substrates. A photonic crystal waveguide is patterned together with subwavelength grating couplers on the transferred nanomembrane. Group index up to 26.5 is experimentally demonstrated.",
author = "Xiaochuan Xu and Harish Subbaraman and Amir Hosseini and Chen, \{Ray T.\}",
year = "2013",
doi = "10.1364/cleo\_si.2013.cth1j.2",
language = "英语",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
publisher = "IEEE Computer Society",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
address = "美国",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}