@inproceedings{b5885fa3dedb4e50bb386fd71cc329e9,
title = "Signal detection of bulk-silicon capacitive dual-axis micro-accelerometers",
abstract = "A novel signal detection method fit for capacitive dual-axis micro-accelerometers is presented based on the research of the bulk-silicon capacitive dual-axis accelerometer's structure and the analysis of differential capacitance detection method. This method could efficiently output the mixed signals on the two axes respectively. Its feasibility is verified by the simulation using HSPICE. Based on CSMC 0.5μm n well DPDM process SPICE BSIM3 MOS model (LEVEL=49) at 5V power supply, the results of simulation are respectively, single-sensitivity 50 mV/g, frequency respond 2.3kHz, and measurement scale ±50g.",
keywords = "Differential capacitance, Dual-axis, Signal detection, Time-division",
author = "Wang Chao and Liu Xiaowei and Ren Yichao and Huo Mingxue",
year = "2007",
doi = "10.1109/ICMA.2007.4303834",
language = "英语",
isbn = "1424408288",
series = "Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007",
pages = "1862--1866",
booktitle = "Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007",
note = "2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007 ; Conference date: 05-08-2007 Through 08-08-2007",
}