@inproceedings{a76499a861d1493fac27e151464ce03f,
title = "Sidewall Imaging of Microstructures with a Tilted Quartz Tuning Fork (QTF) Force Sensor",
abstract = "Sidewall imaging of micro and nano structures is essential for critical dimensional metrology in the semiconductor industry. Atomic force microscope is an important sidewall imaging instrument due to its three dimensional imaging capability, high accuracy and ultra high resolution. We propose an AFM method for sidewall imaging of high step sidewalls. A tuning fork force sensor with a tungsten tip is tilted at a suitable angle (θ) to access the sidewall. Sidewalls of a micro electromechanical systems (MEME) structure fabricated by deep reactive ion etching (DIRE) process is scanned and sidewall roughness is measured.",
keywords = "Atomic Force Microscopy (AFM), Quartz tuning fork (QTF), Sidewall imaging, Sidewall roughness",
author = "Danish Hussain and Wen Yongbing and Hui Xie",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 3rd International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2018 ; Conference date: 04-07-2018 Through 08-07-2018",
year = "2018",
month = oct,
day = "3",
doi = "10.1109/MARSS.2018.8481199",
language = "英语",
series = "MARSS 2018 - International Conference on Manipulation, Automation and Robotics at Small Scales",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Sergej Fatikow and Sinan Haliyo and Fumihito Arai and Albert Sill",
booktitle = "MARSS 2018 - International Conference on Manipulation, Automation and Robotics at Small Scales",
address = "美国",
}