Sensitivity enhancement of bimodal waveguide interferometric sensor based on regional mode engineering

In this paper, we propose a novel bimodal waveguide based on regional mode engineering (BiMW-RME). Leveraging the orthogonality of the guided modes, the form of patterned SiO₂ cladding on the bimodal waveguide can reduce the interaction between the reference mode and the analyte, thereby significantly improving sensitivity. The proposed BiMW-RME sensor experimentally demonstrates a phase sensitivity of 2766 π rad/RIU/cm and a detection limit of 2.44×1⁻⁵ RIU. The sensitivity is 2.7 times higher than that of the conventional BiMW sensor on the same SOI platform. The proposed design strategy demonstrates a significant improvement in the sensor’s sensitivity, presenting a novel approach to enhancing common-path interferometric sensor performance.