Self-testable pressure sensors based on phase change

Mingxue Huo; Rongyan Chuai; Liang Yin; Xiaowei Liu; Xilian Wang

doi:10.1109/NEMS.2006.334594

Self-testable pressure sensors based on phase change

Mingxue Huo^*
, Rongyan Chuai
, Liang Yin
, Xiaowei Liu
, Xilian Wang

^*Corresponding author for this work

School of Astronautics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Appling voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, the method had been used for large-scale pressure sensors. The design and simulation of the new structure, the main fabrication process, and the experimental results on the self-testable function were presented. The self-testable output is up to 3.0% of the full-scale output.

Original language	English
Title of host publication	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages	18-20
Number of pages	3
DOIs	https://doi.org/10.1109/NEMS.2006.334594
State	Published - 2006
Event	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006

Publication series

Name	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Conference

Conference	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/Territory	China
City	Zhuhai
Period	18/01/06 → 21/01/06

Keywords

Phase change
Pressure sensor
Self-testable

Access to Document

10.1109/NEMS.2006.334594

Cite this

Huo, M., Chuai, R., Yin, L., Liu, X., & Wang, X. (2006). Self-testable pressure sensors based on phase change. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 18-20). Article 4134894 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334594

@inproceedings{f292052962f04213801f03db13b27673,

title = "Self-testable pressure sensors based on phase change",

abstract = "Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Appling voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, the method had been used for large-scale pressure sensors. The design and simulation of the new structure, the main fabrication process, and the experimental results on the self-testable function were presented. The self-testable output is up to 3.0\% of the full-scale output.",

keywords = "Phase change, Pressure sensor, Self-testable",

author = "Mingxue Huo and Rongyan Chuai and Liang Yin and Xiaowei Liu and Xilian Wang",

year = "2006",

doi = "10.1109/NEMS.2006.334594",

language = "英语",

isbn = "1424401402",

series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

pages = "18--20",

booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",

}

Huo, M, Chuai, R, Yin, L, Liu, X & Wang, X 2006, Self-testable pressure sensors based on phase change. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4134894, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, pp. 18-20, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 18/01/06. https://doi.org/10.1109/NEMS.2006.334594

Self-testable pressure sensors based on phase change. / Huo, Mingxue; Chuai, Rongyan; Yin, Liang et al.
Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 18-20 4134894 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Huo, Mingxue

AU - Chuai, Rongyan

AU - Yin, Liang

AU - Liu, Xiaowei

AU - Wang, Xilian

PY - 2006

Y1 - 2006

N2 - Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Appling voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, the method had been used for large-scale pressure sensors. The design and simulation of the new structure, the main fabrication process, and the experimental results on the self-testable function were presented. The self-testable output is up to 3.0% of the full-scale output.

AB - Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Appling voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, the method had been used for large-scale pressure sensors. The design and simulation of the new structure, the main fabrication process, and the experimental results on the self-testable function were presented. The self-testable output is up to 3.0% of the full-scale output.

KW - Phase change

KW - Pressure sensor

KW - Self-testable

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DO - 10.1109/NEMS.2006.334594

M3 - 会议稿件

AN - SCOPUS:46149108601

SN - 1424401402

SN - 9781424401406

T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

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BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Y2 - 18 January 2006 through 21 January 2006

ER -

Huo M, Chuai R, Yin L, Liu X, Wang X. Self-testable pressure sensors based on phase change. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 18-20. 4134894. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). doi: 10.1109/NEMS.2006.334594

Self-testable pressure sensors based on phase change

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