Scaling laws for oxygen plasmas

E. A. Bogdanov; V. I. Kolobov; A. A. Kudryavtsev; L. D. Tsendin

doi:10.1109/PLASMA.2002.1030338

Scaling laws for oxygen plasmas

E. A. Bogdanov
, V. I. Kolobov
, A. A. Kudryavtsev
, L. D. Tsendin

Research output: Contribution to journal › Article › peer-review

Abstract

Scaling laws enable one to simply estimate and predict plasma characteristics based of external discharge parameters. The presence of negative ions drastically changes the transport processes that define the spatial distributions of plasma components and other properties of the plasma. Thus, the scaling laws can be derived using a global model of a plasma reactor that assumes certain spatial distributions of charged species.

Original language	English
Article number	106
Pages (from-to)	148
Number of pages	1
Journal	IEEE International Conference on Plasma Science
DOIs	https://doi.org/10.1109/PLASMA.2002.1030338
State	Published - 2002
Externally published	Yes

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title = "Scaling laws for oxygen plasmas",

abstract = "Scaling laws enable one to simply estimate and predict plasma characteristics based of external discharge parameters. The presence of negative ions drastically changes the transport processes that define the spatial distributions of plasma components and other properties of the plasma. Thus, the scaling laws can be derived using a global model of a plasma reactor that assumes certain spatial distributions of charged species.",

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AU - Kolobov, V. I.

AU - Kudryavtsev, A. A.

AU - Tsendin, L. D.

PY - 2002

Y1 - 2002

N2 - Scaling laws enable one to simply estimate and predict plasma characteristics based of external discharge parameters. The presence of negative ions drastically changes the transport processes that define the spatial distributions of plasma components and other properties of the plasma. Thus, the scaling laws can be derived using a global model of a plasma reactor that assumes certain spatial distributions of charged species.

AB - Scaling laws enable one to simply estimate and predict plasma characteristics based of external discharge parameters. The presence of negative ions drastically changes the transport processes that define the spatial distributions of plasma components and other properties of the plasma. Thus, the scaling laws can be derived using a global model of a plasma reactor that assumes certain spatial distributions of charged species.

UR - https://www.scopus.com/pages/publications/0036361111

U2 - 10.1109/PLASMA.2002.1030338

DO - 10.1109/PLASMA.2002.1030338

M3 - 文章

AN - SCOPUS:0036361111

SN - 0730-9244

SP - 148

JO - IEEE International Conference on Plasma Science

JF - IEEE International Conference on Plasma Science

M1 - 106

ER -

Scaling laws for oxygen plasmas

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