Scaling laws for oxygen discharge plasmas

E. A. Bogdanov; V. I. Kolobov; A. A. Kudryavtsev; L. D. Tsendin

doi:10.1134/1.1501672

Scaling laws for oxygen discharge plasmas

E. A. Bogdanov^*
, V. I. Kolobov
, A. A. Kudryavtsev
, L. D. Tsendin

^*Corresponding author for this work

CFD Research Corporation
Peter the Great St. Petersburg Polytechnic University

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.

Original language	English
Pages (from-to)	946-954
Number of pages	9
Journal	Technical Physics
Volume	47
Issue number	8
DOIs	https://doi.org/10.1134/1.1501672
State	Published - 1 Aug 2002
Externally published	Yes

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title = "Scaling laws for oxygen discharge plasmas",

abstract = "A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.",

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AU - Kolobov, V. I.

AU - Kudryavtsev, A. A.

AU - Tsendin, L. D.

PY - 2002/8/1

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AB - A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.

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M3 - 文章

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SN - 1063-7842

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Scaling laws for oxygen discharge plasmas

Abstract

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