Abstract
Several precision measurement techniques for micro-cavity dimension were presented to solve the problem in the field of cavity precision measurement, including non-contact, compensated, and aiming and triggering measurement techniques. For each technique, the measurement principles were analyzed, the measurement ranges were obtained through the design, and the measurement performance was discussed. Three aiming and triggering measurement techniques using optical fiber were mainly analyzed, and their performance was compared. And lastly the development direction of precision measurement for micro-cavity was generalized.
| Original language | English |
|---|---|
| Pages (from-to) | 120-125 |
| Number of pages | 6 |
| Journal | Zhongguo Jixie Gongcheng/China Mechanical Engineering |
| Volume | 21 |
| Issue number | 1 |
| State | Published - 10 Jan 2010 |
Keywords
- Aim and trigger measurement
- Compensated measurement
- Non-contact measurement
- Precision measurement for micro-cavity
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