Research progress of modeling methods and scheduling strategies for semiconductor wafer fabrication

Semiconductor wafer fabrication is a class of typical re-entrant complicated manufacturing system, which has important characteristics such as re-entrant process flows, complexity, uncertainty, multi-objective and multi-constrain. Nowadays, optimized scheduling problem for wafer fabrication is an important research branch in the control. In this paper, the research progress of modeling methods and scheduling strategies for semiconductor wafer fabrication are systemically reviewed according to the main research achievements in recent years, and their primary virtues and deficiencies are also analyzed and discussed, furthermore, their applicable cope are also presented. On the other hand, the criterions and methods of rescheduling are briefly generalized. Some problems worthy of further study and probably developing trends in the semiconductor manufacturing field are presented.