Research on ZnO nanowire manipulation method in scanning electron microscope

In order to realize nano-component manipulation, the contacting mechanism and operating methods during ZnO nanowire manipulation process are researched both in theory and experiments in scanning electron microscope (SEM). Models of manipulation objects are built in nano scale combined with tribology. The adhesion phenomenon and influence of manipulation angle and point are analyzed according to the simulation results and experiments. Then, method of moving ZnO nanowire by fixed operating angle and suitable operating point is proposed. At the same time, the influence of operating distance and the roughness of the substrate are analyzed. Finally, experiments of ZnO nanowire moving, positioning and picking up are carried out with the new method.