Research on vibration of piezoelectric micro cantilever in atomic force microscope

Zengwen Xiao; Xuezeng Zhao; Hongbo Li

Research on vibration of piezoelectric micro cantilever in atomic force microscope

Zengwen Xiao^*
, Xuezeng Zhao
, Hongbo Li

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

To solve the question that piezoelectric microcantilever in atomic force microscope (AFM) vibrates at the frequency nearby resonance in tapping mode, the vibration model of microcantilever is proposed and the first several vibration modes are simulated. The relations between microcantilever parameters and its free end deflexion angle are acquired and the method of reducing measurement error of AFM in tapping mode is presented.

Original language	English
Pages (from-to)	183-185
Number of pages	3
Journal	Zhendong yu Chongji/Journal of Vibration and Shock
Volume	25
Issue number	5
State	Published - Oct 2006

Keywords

AFM
Cantilever
Simulation
Vibration

Cite this

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title = "Research on vibration of piezoelectric micro cantilever in atomic force microscope",

abstract = "To solve the question that piezoelectric microcantilever in atomic force microscope (AFM) vibrates at the frequency nearby resonance in tapping mode, the vibration model of microcantilever is proposed and the first several vibration modes are simulated. The relations between microcantilever parameters and its free end deflexion angle are acquired and the method of reducing measurement error of AFM in tapping mode is presented.",

keywords = "AFM, Cantilever, Simulation, Vibration",

author = "Zengwen Xiao and Xuezeng Zhao and Hongbo Li",

year = "2006",

month = oct,

language = "英语",

volume = "25",

pages = "183--185",

journal = "Zhendong yu Chongji/Journal of Vibration and Shock",

issn = "1000-3835",

publisher = "Chinese Vibration Engineering Society",

number = "5",

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TY - JOUR

T1 - Research on vibration of piezoelectric micro cantilever in atomic force microscope

AU - Xiao, Zengwen

AU - Zhao, Xuezeng

AU - Li, Hongbo

PY - 2006/10

Y1 - 2006/10

N2 - To solve the question that piezoelectric microcantilever in atomic force microscope (AFM) vibrates at the frequency nearby resonance in tapping mode, the vibration model of microcantilever is proposed and the first several vibration modes are simulated. The relations between microcantilever parameters and its free end deflexion angle are acquired and the method of reducing measurement error of AFM in tapping mode is presented.

AB - To solve the question that piezoelectric microcantilever in atomic force microscope (AFM) vibrates at the frequency nearby resonance in tapping mode, the vibration model of microcantilever is proposed and the first several vibration modes are simulated. The relations between microcantilever parameters and its free end deflexion angle are acquired and the method of reducing measurement error of AFM in tapping mode is presented.

KW - AFM

KW - Cantilever

KW - Simulation

KW - Vibration

UR - https://www.scopus.com/pages/publications/33845358390

M3 - 文章

AN - SCOPUS:33845358390

SN - 1000-3835

VL - 25

SP - 183

EP - 185

JO - Zhendong yu Chongji/Journal of Vibration and Shock

JF - Zhendong yu Chongji/Journal of Vibration and Shock

IS - 5

ER -

Research on vibration of piezoelectric micro cantilever in atomic force microscope

Abstract

Keywords

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