Research on variation of the scratching depth in AFM deflection mode using FEM

To control the scratching depth in AFM deflection mode accurately, a control method on the scratching depth is used. Finite Element Method(FEM) is employed to simulate the AFM scratching process. Simulation results show: In the deflection mode, the scratching depth varies greatly. When the control mode is used to modify the AFM deflection mode, the scratching depth can be set and obtained accurately. The control method can be efficiently used to reduce the variation of scratching depth, which meets the requirement of high accuracy micro/nano structures machined by the AFM mechanical scratching method.