@inproceedings{933fcc3460e54df7b5c207615abbf32f,
title = "Research on the floating motion platform for detecting surface defects in KDP crystal",
abstract = "The ultra-precision floating motion platform is the key device for equipment detecting and processing optical elements, and this paper mainly studies the floating motion platform used for detecting the surface detects in KDP crystal. The load capacity of air cushion supporting the floating motion platform is studied theoretically and experimentally, and finally the supply pressure of the four air cushions were optimized under the guidance of its load characteristic curve. The structure parameter of plane flexure hinge, a key part of floating motion platform, is optimized and the simulation results show that the optimized plane flexure hinge can eliminate the disturbance in Z-direction obviously, which is produced by the two motors. Finally the support position of crystal holder is optimized by means of static and modal analysis; and the set of optimized support way can make the maximum deformation of the platform reducing by 2μm and make the 1st order natural frequency increase from 49.078Hz to 51.787Hz.",
keywords = "Floating motion platform, Flotation parameters setting, KDP crystal, Structure optimization",
author = "Chen, \{Ming Jun\} and Zhang, \{Wen Ming\} and Ran Liao and Yong Xiao",
year = "2014",
doi = "10.4028/www.scientific.net/MSF.800-801.537",
language = "英语",
isbn = "9783038351429",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "537--542",
editor = "Xianli Liu and Bin Jiang and Xuefeng Wu and Caixu Yue",
booktitle = "High Speed Machining VI",
address = "瑞士",
note = "6th International Conference on High Speed Machining, ICHSM 2014 ; Conference date: 24-07-2014 Through 25-07-2014",
}