@inproceedings{2c4c21d7a07143dcba8bc82cefa25154,
title = "Research on the controlling technology of deliquescent action in polishing of KDP crystals based on deliquescent action",
abstract = "Combined with the characteristics of polishing technology for KDP crystals based on deliquescent action, the controlling method of deliquescent action in polishing of KDP crystals based on deliquescent action is proposed. The performance requirements of polishing fluid in polishing of KDP crystals based on deliquescent action are given. According to these performance requirements, the main components of the polishing fluid are determined. Based on the controlling method of deliquescent action, the polishing experiments of KDP crystals were carried out, the experimental results have verified the validity of the controlling method of deliquescent action.",
keywords = "Controlling technology, Deliquescent action, KDP crystals, Ultraprecision machining",
author = "Shaolong Guo and Feihu Zhang and Yong Zhang",
note = "Publisher Copyright: {\textcopyright} ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings. All rights reserved.; 2012 International Conference on Planarization/CMP Technology, ICPT 2012 ; Conference date: 15-10-2012 Through 17-10-2012",
year = "2012",
language = "英语",
series = "ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings",
publisher = "VDE Verlag GmbH",
pages = "327--332",
booktitle = "ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings",
}