TY - GEN
T1 - Research on the control of reticle stage macro movement motor
AU - Dong, Yue
AU - Chen, Xing Lin
AU - Liu, Yang
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2015/3/2
Y1 - 2015/3/2
N2 - The reticle stage of lithography is a high precision servo motion platform, which requires using macro movement of linear motor and micro movement of voice coil motor to realize an nm-level positioning precision and tracking. In order to increase the control effect and response speed of macro movement motor of reticle stage of lithography, there we present a control strategy in combination with feed-forward thrust fluctuation compensation based on query table, the PID controller, and robust ILC controller. Firstly, the method separate the tracking error that is caused by the motor thrust fluctuation, then according to the speed build a query table to construct feedforward thrust fluctuation model, which is used for system thrust fluctuation compensation; the PID controller aim to improve the anti-interference ability of the system; through adding the attenuation factor, the robust ILC controller ensure the tracking error would be astringe to zero. The results showed that this method can well restrain the effects of thrust fluctuation from the motor, and the macro movement motor positioning quickly and accurately.
AB - The reticle stage of lithography is a high precision servo motion platform, which requires using macro movement of linear motor and micro movement of voice coil motor to realize an nm-level positioning precision and tracking. In order to increase the control effect and response speed of macro movement motor of reticle stage of lithography, there we present a control strategy in combination with feed-forward thrust fluctuation compensation based on query table, the PID controller, and robust ILC controller. Firstly, the method separate the tracking error that is caused by the motor thrust fluctuation, then according to the speed build a query table to construct feedforward thrust fluctuation model, which is used for system thrust fluctuation compensation; the PID controller aim to improve the anti-interference ability of the system; through adding the attenuation factor, the robust ILC controller ensure the tracking error would be astringe to zero. The results showed that this method can well restrain the effects of thrust fluctuation from the motor, and the macro movement motor positioning quickly and accurately.
KW - Feed-forward compensation
KW - Lithography
KW - Macro movement of linear motor
KW - PID controller
KW - Reticle stage
KW - Robust ILC
UR - https://www.scopus.com/pages/publications/84932176295
U2 - 10.1109/WCICA.2014.7053122
DO - 10.1109/WCICA.2014.7053122
M3 - 会议稿件
AN - SCOPUS:84932176295
T3 - Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
SP - 2531
EP - 2535
BT - Proceeding of the 11th World Congress on Intelligent Control and Automation, WCICA 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 11th World Congress on Intelligent Control and Automation, WCICA 2014
Y2 - 29 June 2014 through 4 July 2014
ER -