TY - GEN
T1 - Research on the atmospheric pressure plasma processing of micro freeform optical surface on fused silica substrate
AU - Zhang, Peng
AU - Wang, Bo
AU - Su, Xing
AU - Wu, Yangong
AU - Li, Na
PY - 2016
Y1 - 2016
N2 - Reaction mechanism of atmospheric pressure plasma processing is introduced briefly. Then, a numeral control machining system of APPP and two types of plasma torch are developed. In order to ensure the surface figure accuracy of micro freeform optical surface, the error sources of APPP are analyzed, and the effective processing methods for improving the surface figure accuracy are presented. At last, two kinds of micro freeform optical surface, the sinusoidal grid and the continuous-contour phase plate, are fabricated by the APPP technology of which shows a great potential to fabricate micro freeform optical surface on fused silica substrate.
AB - Reaction mechanism of atmospheric pressure plasma processing is introduced briefly. Then, a numeral control machining system of APPP and two types of plasma torch are developed. In order to ensure the surface figure accuracy of micro freeform optical surface, the error sources of APPP are analyzed, and the effective processing methods for improving the surface figure accuracy are presented. At last, two kinds of micro freeform optical surface, the sinusoidal grid and the continuous-contour phase plate, are fabricated by the APPP technology of which shows a great potential to fabricate micro freeform optical surface on fused silica substrate.
UR - https://www.scopus.com/pages/publications/85009135404
M3 - 会议稿件
AN - SCOPUS:85009135404
T3 - Proceedings - ASPE 2016 Annual Meeting
SP - 586
EP - 589
BT - Proceedings - ASPE 2016 Annual Meeting
PB - American Society for Precision Engineering, ASPE
T2 - 31st Annual Meeting of the American Society for Precision Engineering, ASPE 2016
Y2 - 23 October 2016 through 28 October 2016
ER -