Abstract
The nanoindention experiments were completed on single crystal silicon and obtained load-depth curve. Real 3-dimensional morphological images of residual indentation were obtained by atomic force microscopy (AFM), and the residual areas and hardness were calculated by combining Matlab software directly from AFM images. The comparing and analysis hardness of Oliver-Pharr method and hardness of directly area method reveal that the two hardnesses appear indentation size effect (ISE) as well in micro-nanoindentation, but the ISE of direct area method is more prominent than Oliver-Pharr method.
| Original language | English |
|---|---|
| Pages (from-to) | 2052-2055 |
| Number of pages | 4 |
| Journal | Zhongguo Jixie Gongcheng/China Mechanical Engineering |
| Volume | 16 |
| Issue number | 22 |
| State | Published - 25 Nov 2005 |
Keywords
- Atomic force microscopy
- Direct area method
- Hardness
- Nanoidentation
- Single crystal silicon
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