Research on multifunctional micro machining equipment

To perform several micro-machining on same machine tool, a micro machining equipment was researched and developed. The equipment adopts some high and new technologies. It is equipped with high precision XYZ stage, a spindle with high rotation accuracy and variable rotation speed, a granite worktable, a block electro discharge grinding unit for machining micro rod, a ultrasonic vibration unit for workpiece vibrating, a high frequency pulse power supply for micro-ECM and a video microscopic system with high enlargement factor. The equipment can perform micro electro discharge machining (EDM), micro electrochemical machining (ECM), micro ultrasonic machining (USM) as well as their combination. It can also machine 3D microstructures. A series of experiments were carried out. Using micro-EDM, micro rods with the diameter of less than 5μm were ground on block electrode, micro holes and 3D microstructures were obtained. Shaped holes were machined by using combination of micro-EDM and micro-USM. A micro hole with the diameter of 100μm was machined via micro-ECM.