@inproceedings{aad5665001504fe394122fba72afe323,
title = "Research on model identification of ultraprecision motion stage",
abstract = "Analyzing the structure of precision motion platform, building mathematical model of linear motors and voice coil motors, thereby macro-micro coupling theoretical models and mechanical model are established, which can reflect the combined effect of multiple motors motion characteristics. The unknown parameters of the macro-micro coupling theoretical model are identified by adaptive real-coded genetic algorithm. Validity of the precision motion platform model has been verified by simulations.",
keywords = "Adaptive real-coded genetic algorithm, Parameter identification, Precision positioning stage",
author = "Sheng Qiang and Bin Wang",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Optical Modeling and Performance Predictions VII ; Conference date: 10-08-2015 Through 13-08-2015",
year = "2015",
doi = "10.1117/12.2185797",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Kahan, \{Mark A.\} and Levine-West, \{Marie B.\}",
booktitle = "Optical Modeling and Performance Predictions VII",
address = "美国",
}