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Research on model identification of ultraprecision motion stage

  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Analyzing the structure of precision motion platform, building mathematical model of linear motors and voice coil motors, thereby macro-micro coupling theoretical models and mechanical model are established, which can reflect the combined effect of multiple motors motion characteristics. The unknown parameters of the macro-micro coupling theoretical model are identified by adaptive real-coded genetic algorithm. Validity of the precision motion platform model has been verified by simulations.

Original languageEnglish
Title of host publicationOptical Modeling and Performance Predictions VII
EditorsMark A. Kahan, Marie B. Levine-West
PublisherSPIE
ISBN (Electronic)9781628417432
DOIs
StatePublished - 2015
EventOptical Modeling and Performance Predictions VII - San Diego, United States
Duration: 10 Aug 201513 Aug 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9577
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Modeling and Performance Predictions VII
Country/TerritoryUnited States
CitySan Diego
Period10/08/1513/08/15

Keywords

  • Adaptive real-coded genetic algorithm
  • Parameter identification
  • Precision positioning stage

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