Abstract
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool. The machine tool is made up of precise feed stages, spindle, wire electrical discharge grinding (WEDG) device, pulse power supply of micro EDM, granite worktable, servo and control system and so on. It has the function of linked 3-axes NC. The feeding resolution of each axis is 0.1 μm. The rotation run-out of spindle is less than 1 μm. The rotation speed is 1000-25000 r/min, and can be changed continuously. The machine tool can be placed on a desk. With the machine tool, some elementary experiments have been carried out. Micro rod less than 15 μm in diameter and micro holes with diameter of 25 μm were stably obtained. The 3D micro-configurations were also machined.
| Original language | English |
|---|---|
| Pages (from-to) | 402-405 |
| Number of pages | 4 |
| Journal | Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology |
| Volume | 38 |
| Issue number | 3 |
| State | Published - Mar 2006 |
Keywords
- 3D micro-configurations
- Machine tool
- Micro-EDM
- Micro-hole
- Micro-rod
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