Research on MEMS kerosene gas sensor technology based on the nano sensitive material

Aiming at the issues of kerosene gas sensor such as difficult to pair, poor consistency, high power consumption and not interchangeable etc., a new type of kerosene gas sensor based on nano sensitive material and MEMS technology is studied in the paper. Firstly, an integrated micro-cantilever type of sensor structure is designed and produced based on the research of performance and production process of nano sensitive material, and had thermal simulation for the structure to verify correctness and feasibility. Finally, the studied sensor is verified by experiments. Results show that the kerosene gas sensor produced by the proposed strategy has high sensitivity and linearity. In the paper, new materials, techniques and methods are adopted to study the kerosene gas sensor, which improve reliability and sensitivity of the sensor effectively.