Research on Electromagnetic Drive Modeling and Precision Hall Measurement of Maglev Platform

With the rapid development of the integrated circuit manufacturing industry, extreme ultraviolet lithography (EUVL) technology with maglev stage has become a focus of research in the scientific and industrial communities. Hall sensors use the magnetic steel magnetic field of the magnetic levitation stage to measure the position of the moving elements of the platform, which can reduce costs and simplify the mechanical system structure. This paper conducts research on the method of finding the displacement of the moving element by combining orthogonal Hall sensors with arctangent. The influence of the spatial magnetic field distribution is analyzed with the coil energized on the displacement caused by the arctangent solution. Based on the analysis, a Hall sensor rotor position calculation method is proposed. An electromagnetic force-driven model is established, and the distribution of coil current is determined. Then, a two-stage error correction algorithm to eliminate coil magnetic field interference and Halbach magnetic steel array harmonic distortion is proposed. The experimental results on a maglev system showed that the proposed method has accurate measurement accuracy and provides a good foundation for maglev motion control.