Research on electrode wear prediction and compensation on-line technology for micro EDM application

Y. Zhang; Z. L. Wang; Z. Y. Li; W. S. Zhao

Research on electrode wear prediction and compensation on-line technology for micro EDM application

Y. Zhang^*
, Z. L. Wang
, Z. Y. Li
, W. S. Zhao

^*Corresponding author for this work

Harbin Institute of Technology
Shanghai Jiao Tong University

Research output: Contribution to journal › Article › peer-review

Abstract

A micro-EDM equipment which can fabricate three-dimensional micro-structures is developed. A method of electrode wear compensation on-line which is very important to micro 3D structures machined by micro-EDM is presented. In this method, the wear of electrode can be predicted by the statistics law of open rate of discharge status, therefore, its precise model which is very difficult to build as well as the special CAD/CAM system is hardly necessary. At the same time, the micro-EDM CAD/CAM technology which applies the universal CAD/CAM software for milling is also researched and experienced on Unigraphics (UG). At last, micro 3D structures, a micro hemisphere with diameter Ø150μm and a micro 3D beam which is very popular in MEMS, are machined on silicon wafer by this way, which proves the wide useful of this method and the promising application in MEMS.

Original language	English
Pages (from-to)	166-171
Number of pages	6
Journal	Key Engineering Materials
Volume	392-394
State	Published - 2009

Keywords

3D structure
CAD/CAM
Electrode wear prediction and compensation
Micro EDM

Cite this

@article{c3c0fa901c6b4dd2810d08eb76bafc7e,

title = "Research on electrode wear prediction and compensation on-line technology for micro EDM application",

abstract = "A micro-EDM equipment which can fabricate three-dimensional micro-structures is developed. A method of electrode wear compensation on-line which is very important to micro 3D structures machined by micro-EDM is presented. In this method, the wear of electrode can be predicted by the statistics law of open rate of discharge status, therefore, its precise model which is very difficult to build as well as the special CAD/CAM system is hardly necessary. At the same time, the micro-EDM CAD/CAM technology which applies the universal CAD/CAM software for milling is also researched and experienced on Unigraphics (UG). At last, micro 3D structures, a micro hemisphere with diameter {\O}150μm and a micro 3D beam which is very popular in MEMS, are machined on silicon wafer by this way, which proves the wide useful of this method and the promising application in MEMS.",

keywords = "3D structure, CAD/CAM, Electrode wear prediction and compensation, Micro EDM",

author = "Y. Zhang and Wang, \{Z. L.\} and Li, \{Z. Y.\} and Zhao, \{W. S.\}",

year = "2009",

language = "英语",

volume = "392-394",

pages = "166--171",

journal = "Key Engineering Materials",

issn = "1013-9826",

publisher = "Trans Tech Publications Ltd",

}

TY - JOUR

T1 - Research on electrode wear prediction and compensation on-line technology for micro EDM application

AU - Zhang, Y.

AU - Wang, Z. L.

AU - Li, Z. Y.

AU - Zhao, W. S.

PY - 2009

Y1 - 2009

N2 - A micro-EDM equipment which can fabricate three-dimensional micro-structures is developed. A method of electrode wear compensation on-line which is very important to micro 3D structures machined by micro-EDM is presented. In this method, the wear of electrode can be predicted by the statistics law of open rate of discharge status, therefore, its precise model which is very difficult to build as well as the special CAD/CAM system is hardly necessary. At the same time, the micro-EDM CAD/CAM technology which applies the universal CAD/CAM software for milling is also researched and experienced on Unigraphics (UG). At last, micro 3D structures, a micro hemisphere with diameter Ø150μm and a micro 3D beam which is very popular in MEMS, are machined on silicon wafer by this way, which proves the wide useful of this method and the promising application in MEMS.

AB - A micro-EDM equipment which can fabricate three-dimensional micro-structures is developed. A method of electrode wear compensation on-line which is very important to micro 3D structures machined by micro-EDM is presented. In this method, the wear of electrode can be predicted by the statistics law of open rate of discharge status, therefore, its precise model which is very difficult to build as well as the special CAD/CAM system is hardly necessary. At the same time, the micro-EDM CAD/CAM technology which applies the universal CAD/CAM software for milling is also researched and experienced on Unigraphics (UG). At last, micro 3D structures, a micro hemisphere with diameter Ø150μm and a micro 3D beam which is very popular in MEMS, are machined on silicon wafer by this way, which proves the wide useful of this method and the promising application in MEMS.

KW - 3D structure

KW - CAD/CAM

KW - Electrode wear prediction and compensation

KW - Micro EDM

UR - https://www.scopus.com/pages/publications/58849158773

M3 - 文章

AN - SCOPUS:58849158773

SN - 1013-9826

VL - 392-394

SP - 166

EP - 171

JO - Key Engineering Materials

JF - Key Engineering Materials

ER -

Research on electrode wear prediction and compensation on-line technology for micro EDM application

Abstract

Keywords

Other files and links

Fingerprint

Cite this