TY - GEN
T1 - Research on deliquescent polishing fluid for KDP crystals
AU - Guo, S. L.
AU - Zhang, F. H.
AU - Zhang, Y.
AU - Luan, D. R.
PY - 2009
Y1 - 2009
N2 - The characteristics and principle of deliquescent polishing technology for potassium dihydrogen phosphate (KDP) crystals are introduced, and the performance requirements of deliquescent polishing fluid for KDP crystals are proposed. The main components of the deliquescent polishing fluid for KDP crystals were selected according to these performance requirements. Through uniformity experiment, stability experiment and fluidity experiment, uniformity, stability and fluidity of deliquescent polishing fluid for KDP crystals prepared using the selected components were tested. Through deliquescent polishing experiment of KDP crystal, polishing performance of deliquescent polishing fluid compounded using the selected components was tested. The material removal rate of the KDP crystal in the deliquescent polishing experiment was 6.03μm/min, and the surface roughness of the KDP crystal after deliquescent polishing was 4.857nm. The experimental results show that the compounded deliquescent polishing fluid for KDP crystals has good polishing performance and can reach the requirements.
AB - The characteristics and principle of deliquescent polishing technology for potassium dihydrogen phosphate (KDP) crystals are introduced, and the performance requirements of deliquescent polishing fluid for KDP crystals are proposed. The main components of the deliquescent polishing fluid for KDP crystals were selected according to these performance requirements. Through uniformity experiment, stability experiment and fluidity experiment, uniformity, stability and fluidity of deliquescent polishing fluid for KDP crystals prepared using the selected components were tested. Through deliquescent polishing experiment of KDP crystal, polishing performance of deliquescent polishing fluid compounded using the selected components was tested. The material removal rate of the KDP crystal in the deliquescent polishing experiment was 6.03μm/min, and the surface roughness of the KDP crystal after deliquescent polishing was 4.857nm. The experimental results show that the compounded deliquescent polishing fluid for KDP crystals has good polishing performance and can reach the requirements.
KW - Deliquescent polishing
KW - Deliquescent polishing fluid
KW - KDP crystals
KW - Ultraprecision machining
UR - https://www.scopus.com/pages/publications/70449589531
U2 - 10.4028/www.scientific.net/MSF.626-627.53
DO - 10.4028/www.scientific.net/MSF.626-627.53
M3 - 会议稿件
AN - SCOPUS:70449589531
SN - 0878493115
SN - 9780878493111
T3 - Materials Science Forum
SP - 53
EP - 58
BT - Advances in Materials Manufacturing Science and Technology XIII
PB - Trans Tech Publications Ltd
T2 - 13th International Manufacturing Conference in China, IMCC2009
Y2 - 21 September 2009 through 23 September 2009
ER -