Research on analysing and compensation of the steady disturbing torque of the three axis air bearing table

A dynamics model of the three axis air bearing table including the unbalance torque of the gravity and the steady disturbing torque in the inertial coodinate system was built up. Then two methods were proposed to analyze the torque, in which the first one used the method of dynamics inversion and the other one was based on the compound pendulum theory. The compute results with the simulation data proved the correctness of the two methods. Then the model of the air bearing was set up with fluent, the result indicated that the relationship between the inclined torque and the inclination of the bearing chock was nearly linear, Thus the method for balancing the the steady disturbing torque in the inertial coodinate system was proposed, in which the the inclined torque imported to compensate the steady disturbing torque. The experiment showed that this method was valid.