Research on a three-link six-DOF micromanipulator with flexure hinges

A three-link six degree-of-freedom (DOF) parallel micromanipulator is presented. Three inextensible limbs with the spherical flexure joints and single-axis rotary flexure joints at the two ends are adopted to simplify the complex structure and a monolithic base plate that consists of three 2-DOF compliant units is utilized to reduce the assembly error. The piezoelectric elements are used as the high resolution actuators. The kinematics solutions are analyzed using the kinematic influence coefficient theory, As a result, the velocity of a movable platform, the limbs and the flexure hinges are derived. The stiffness model of the micromanipulator is determined considering the elastic deformations of the flexure hinges based on virtual work principle. The design targets and the design principles are discussed and the precise position controller modules are used to control the micromanipulator. Finally, the primary experiment tests are performed and the results show that the nanometer scale precision is attained.