Research of a novel dual-driven 2-DOF planar parallel robot

A novel high speed/high precision robot with two permanent linear motors drived a 2-DOF planar parallel piezo smart mechanism was proposed. By taking a linear motors as master driver to realize fast precision positioning in large displacement motion and by preshaping input command technique to suppress vibration, and using a piezo as slave driver and closed loop feedback controller to restrain residual vibration, the dual driving structure could supress the vibration of robot ideally. Experiment results indicate that this approach realizes high performance point-to-point control precisely, the maximum acceleration is 2 g, steady time is less than 150 ms, and repeatability is less than ±5 μm.