TY - GEN
T1 - Queueing generalized stochastic colored timed Petri nets- Based approach to modeling for semiconductor wafer fabrication
AU - Cao, Zheng Cai
AU - Qiao, Fei
AU - Wu, Qi Di
PY - 2007
Y1 - 2007
N2 - Some of the important characteristics of the semiconductor wafer fabrication factories are re-entrant process flows, a dynamic and uncertain environment, resource sharing, unpredicted machine breakdown, etc. So, the design, implementation, and operation of manufacturing systems is a complex task. Without powerful modeling techniques it is practically impossible to efficiently design a manufacturing system. Modeling the system is a premise work to optimize the properties of the system. In this paper, a modeling approach based on queueing generalized stochastic colored timed Petri-net (QGSCTPN) for semiconductor wafer fabrication is presented. The main idea of this tool is to combine colored timed Petri nets with the queuing systems, and it aims to make simulation over the model more efficient. It also can be used to model various detail of manufacturing system such as re-entrant processing, machine failures, loading and unloading, etc., pertaining to wafer fabrication. Using the industrial example as a case study, this paper aims at presenting some theoretical methods and their application using a modeling tool during the design of manufacturing systems. Finally, the aim of next-step work is put-forward.
AB - Some of the important characteristics of the semiconductor wafer fabrication factories are re-entrant process flows, a dynamic and uncertain environment, resource sharing, unpredicted machine breakdown, etc. So, the design, implementation, and operation of manufacturing systems is a complex task. Without powerful modeling techniques it is practically impossible to efficiently design a manufacturing system. Modeling the system is a premise work to optimize the properties of the system. In this paper, a modeling approach based on queueing generalized stochastic colored timed Petri-net (QGSCTPN) for semiconductor wafer fabrication is presented. The main idea of this tool is to combine colored timed Petri nets with the queuing systems, and it aims to make simulation over the model more efficient. It also can be used to model various detail of manufacturing system such as re-entrant processing, machine failures, loading and unloading, etc., pertaining to wafer fabrication. Using the industrial example as a case study, this paper aims at presenting some theoretical methods and their application using a modeling tool during the design of manufacturing systems. Finally, the aim of next-step work is put-forward.
KW - Modeling
KW - Queueing generalized stochastic colored timed Petri-net
KW - Semiconductor wafer fabrication
UR - https://www.scopus.com/pages/publications/44349139438
U2 - 10.1109/ICCA.2007.4376879
DO - 10.1109/ICCA.2007.4376879
M3 - 会议稿件
AN - SCOPUS:44349139438
SN - 1424408180
SN - 9781424408184
T3 - 2007 IEEE International Conference on Control and Automation, ICCA
SP - 2834
EP - 2838
BT - 2007 IEEE International Conference on Control and Automation, ICCA
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2007 IEEE International Conference on Control and Automation, ICCA
Y2 - 30 May 2007 through 1 June 2007
ER -