TY - GEN
T1 - PZT driven triple-finger end effectors for micro-manipulation
AU - Liu, Jinyong
AU - Chen, Tao
AU - Liu, Huicong
AU - Chou, Xiujian
AU - Sun, Lining
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/10/2
Y1 - 2015/10/2
N2 - This paper presented the design, simulation, fabrication and evaluation of the discrete triple-finger end effectors. In the design, three cantilevers were considered as the finger of end effectors. Tungsten tipped probes were used to pick and place the micro-objects. The cantilevers were driven by piezoelectric ceramic transducer (PZT). In the simulation, the finite element analysis had been used to optimize the whole device and analyze the stress of the model. The total deformation and the stress had been worked out to assist the fabrication. With the fabrication of the device, the triple-finger end effectors had been assembled to manipulate the borosilicate glass spheres of different size. Two-layered structures were also built with the discrete triple-finger end effectors. The maximum stroke of every probe was 70 μm. Fine positioning was achieved by the use of piezoelectric actuation. The manipulation of micro-spheres had been carried out to show applied range of the triple-finger device with piezoelectric actuator. This device could manipulate the spheres of the size from 20-40 μm and could place them to the target place in 1 s.
AB - This paper presented the design, simulation, fabrication and evaluation of the discrete triple-finger end effectors. In the design, three cantilevers were considered as the finger of end effectors. Tungsten tipped probes were used to pick and place the micro-objects. The cantilevers were driven by piezoelectric ceramic transducer (PZT). In the simulation, the finite element analysis had been used to optimize the whole device and analyze the stress of the model. The total deformation and the stress had been worked out to assist the fabrication. With the fabrication of the device, the triple-finger end effectors had been assembled to manipulate the borosilicate glass spheres of different size. Two-layered structures were also built with the discrete triple-finger end effectors. The maximum stroke of every probe was 70 μm. Fine positioning was achieved by the use of piezoelectric actuation. The manipulation of micro-spheres had been carried out to show applied range of the triple-finger device with piezoelectric actuator. This device could manipulate the spheres of the size from 20-40 μm and could place them to the target place in 1 s.
KW - Microelectromechanical systems (MEMS)
KW - micromanipulation
KW - triple-finger
UR - https://www.scopus.com/pages/publications/84962298957
U2 - 10.1109/CYBER.2015.7288107
DO - 10.1109/CYBER.2015.7288107
M3 - 会议稿件
AN - SCOPUS:84962298957
T3 - 2015 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, IEEE-CYBER 2015
SP - 1156
EP - 1161
BT - 2015 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, IEEE-CYBER 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 5th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, IEEE-CYBER 2015
Y2 - 9 June 2015 through 12 June 2015
ER -