Products of Sensors and MEMS

Yu Fei Han; Yun Zhuo Sun; Mingjiang Wang; Qiang Liu; Ran Tao

doi:10.1007/978-981-99-2836-1_18

Products of Sensors and MEMS

Yu Fei Han
, Yun Zhuo Sun
, Mingjiang Wang^*
, Qiang Liu
, Ran Tao

^*Corresponding author for this work

Harbin Institute of Technology Shenzhen
CAS - Shanghai Institute of Microsystem and Information Technology
Synopsys Inc.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

MEMS stands for micro-electro-mechanical system, generally integrated with microsensors, microprocessors, and micromechanical structures. Based on miniaturization technology, MEMS sensors, actuators, and microsystems, such as pressure sensors, inertial sensors, RF components and modules, micro-optoelectro-mechanical system (MOEMS), image sensors, biochemical and biomedical systems, energy harvesters, have been developed. They are widely used in auto industry, internet of things (IoT), smart phone, health care-related industry, etc. Several MEMS sensors are discussed in this chapter. Their progresses of technology, basic structures, and main applications are briefly described.

Original language	English
Title of host publication	Handbook of Integrated Circuit Industry
Publisher	Springer Nature
Pages	357-381
Number of pages	25
ISBN (Electronic)	9789819928361
ISBN (Print)	9789819928354
DOIs	https://doi.org/10.1007/978-981-99-2836-1_18
State	Published - 1 Jan 2023
Externally published	Yes

Keywords

Actuator
MEMS
MOEMS
Microsystem
Sensor

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10.1007/978-981-99-2836-1_18

Cite this

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keywords = "Actuator, MEMS, MOEMS, Microsystem, Sensor",

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AU - Han, Yu Fei

AU - Sun, Yun Zhuo

AU - Wang, Mingjiang

AU - Liu, Qiang

AU - Tao, Ran

N1 - Publisher Copyright: © Publishing House of Electronics Industry 2024.

PY - 2023/1/1

Y1 - 2023/1/1

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AB - MEMS stands for micro-electro-mechanical system, generally integrated with microsensors, microprocessors, and micromechanical structures. Based on miniaturization technology, MEMS sensors, actuators, and microsystems, such as pressure sensors, inertial sensors, RF components and modules, micro-optoelectro-mechanical system (MOEMS), image sensors, biochemical and biomedical systems, energy harvesters, have been developed. They are widely used in auto industry, internet of things (IoT), smart phone, health care-related industry, etc. Several MEMS sensors are discussed in this chapter. Their progresses of technology, basic structures, and main applications are briefly described.

KW - Actuator

KW - MEMS

KW - MOEMS

KW - Microsystem

KW - Sensor

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SP - 357

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BT - Handbook of Integrated Circuit Industry

PB - Springer Nature

ER -

Products of Sensors and MEMS

Abstract

Keywords

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