TY - GEN
T1 - Processing microgrooves and craters on the surface of wide band gap mold material using femtosecond laser
AU - Zhao, Qingliang
AU - Jiang, Tao
AU - Dong, Zhiwei
AU - Fan, Rongwei
AU - Yu, Xin
PY - 2010
Y1 - 2010
N2 - A femtosecond pulsed Ti: sapphire laser micro-manufacturing system was used to investigate the ablation characteristics and material removal mechanisms of wide band gap mold material SiC in theoretical and experimental aspects. Through percussion and parallel processing methods, two kinds of microstructures regarding craters and grooves, which had important specifically applications in micromachining and replication manufacturing, were fabricated in air respectively. Scanning Electron Microscopy (SEM), Talysurf Profilometer (Talysurf), Atomic Force Microscope (AFM) and Optical Microscope (OM) were used to identify and measure the morphological characteristics and chemical composition of the mold material surface before and after processing. The ablation threshold and waist radius were determined according to the numerical relationship between micro craters and laser fluencies, whose results were 0.31J/cm2 and 32μm, respectively. Meanwhile, the interacting procedures of samples and photons showed two stages, which were called optical and thermal penetration, with corresponded characteristics 0.13J/cm2 and 0.61J/cm2. Besides, the femtosecond laser repetition rate, pulse numbers, pulse energy and the scanning velocity effect on the modification microstructures surface geometry were examined systematically. Furthermore, the wide band gap mold sample SiC, combining with the micro grooves and craters' topography, material removal mechanisms were also analyzed in detail.
AB - A femtosecond pulsed Ti: sapphire laser micro-manufacturing system was used to investigate the ablation characteristics and material removal mechanisms of wide band gap mold material SiC in theoretical and experimental aspects. Through percussion and parallel processing methods, two kinds of microstructures regarding craters and grooves, which had important specifically applications in micromachining and replication manufacturing, were fabricated in air respectively. Scanning Electron Microscopy (SEM), Talysurf Profilometer (Talysurf), Atomic Force Microscope (AFM) and Optical Microscope (OM) were used to identify and measure the morphological characteristics and chemical composition of the mold material surface before and after processing. The ablation threshold and waist radius were determined according to the numerical relationship between micro craters and laser fluencies, whose results were 0.31J/cm2 and 32μm, respectively. Meanwhile, the interacting procedures of samples and photons showed two stages, which were called optical and thermal penetration, with corresponded characteristics 0.13J/cm2 and 0.61J/cm2. Besides, the femtosecond laser repetition rate, pulse numbers, pulse energy and the scanning velocity effect on the modification microstructures surface geometry were examined systematically. Furthermore, the wide band gap mold sample SiC, combining with the micro grooves and craters' topography, material removal mechanisms were also analyzed in detail.
KW - ablation threshold
KW - femtosecond laser
KW - microstructure
KW - mold material
KW - removal mechanism
UR - https://www.scopus.com/pages/publications/78650032741
U2 - 10.1117/12.866957
DO - 10.1117/12.866957
M3 - 会议稿件
AN - SCOPUS:78650032741
SN - 9780819480859
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies
T2 - 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Y2 - 26 April 2010 through 29 April 2010
ER -