TY - GEN
T1 - Processing circuits of weak capacitance signal for spherical scattering electrical-field probing sensor
AU - Xingyuan, Bian
AU - Yesheng, Lu
AU - Yamin, Zhao
AU - Jiubin, Tan
AU - Junning, Cui
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/11
Y1 - 2019/11
N2 - A spherical scattering electrical-field probe(SSEP) with noncontact, 3D isotropy and approximate point probing characteristics has been proposed for high-precision measurement of micro and small structures with large aspect ratio. Development of signal processing circuits for detection of weak cpacitantive signal on sub-picofarad level is the key to realize nanometer resolution. In this paper, a set of signal processing circuits based on operational capacitance measurement principle is proposed, and characteristics of the circuits are theorically analyzed and optimized. Experimental results indicates that resolution of 1 nm and nonlinearity of6 nm are achieved with the proposed signal processing circuits for a SSEP with \phi 2.5 mm probing ball.
AB - A spherical scattering electrical-field probe(SSEP) with noncontact, 3D isotropy and approximate point probing characteristics has been proposed for high-precision measurement of micro and small structures with large aspect ratio. Development of signal processing circuits for detection of weak cpacitantive signal on sub-picofarad level is the key to realize nanometer resolution. In this paper, a set of signal processing circuits based on operational capacitance measurement principle is proposed, and characteristics of the circuits are theorically analyzed and optimized. Experimental results indicates that resolution of 1 nm and nonlinearity of6 nm are achieved with the proposed signal processing circuits for a SSEP with \phi 2.5 mm probing ball.
KW - nanometer resolution
KW - signal processing circuits
KW - spherical scattering electrical-field probe
KW - weak capacitance detection
UR - https://www.scopus.com/pages/publications/85085998337
U2 - 10.1109/ICEMI46757.2019.9101549
DO - 10.1109/ICEMI46757.2019.9101549
M3 - 会议稿件
AN - SCOPUS:85085998337
T3 - 2019 14th IEEE International Conference on Electronic Measurement and Instruments, ICEMI 2019
SP - 692
EP - 697
BT - 2019 14th IEEE International Conference on Electronic Measurement and Instruments, ICEMI 2019
A2 - Wu, Juan
A2 - Yin, Jiali
A2 - Qi, Zhang
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 14th IEEE International Conference on Electronic Measurement and Instruments, ICEMI 2019
Y2 - 1 November 2019 through 3 November 2019
ER -