@inproceedings{958f51bd843f42c6825dd6dc9130975a,
title = "Preparation of silicon coating on SiC mirror by EB-PVD",
abstract = "Some investigations into preparation of silicon coating on SiC mirror by Electronic Beam Physical Vapor Deposition (EB-PVD) are introduced in the paper, which include adhesion strength of coating to substrate, pattern of coating, and residual stress etc. According to the investigations, it was found that only when the temperature of substrate in the optimization temperature range, the excellent thermal-shock resistance and adhesion strength of coating to substrate are obtained. Furthermore, the coating has the column crystal structure, surface finish, deposition rate and gravity direction may have important influences on properties of coating-substrate system.",
keywords = "Adhesion strength, Coating, Coating-substrate system, Column crystal, EB-PVD, Finish, Mirror, Porosity, Silicon, Substrate",
author = "Yumin Zhang and Yufeng Zhou and Jiecai Han and Jianhan Zhang and Wang Yao and Yuanyuan Han",
year = "2006",
doi = "10.1117/12.674280",
language = "英语",
isbn = "0819461881",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies ; Conference date: 02-11-2005 Through 05-11-2005",
}