@inproceedings{8852fcfc59884909b8296d7d07e89e8c,
title = "Preparation and properties of PZT thin films produced by decomposition of metal carboxylate gels",
abstract = "In this work, PZT (Zr/Ti=52/48) thin films have been prepared using aqueous organic gel method. The desired metal cations are chelated in a solution using citric acid and ethylenediaminetertraacetic acid (EDTA) as the chelating agents. The thermal decompostion of the metal carboxylate precursors gels have been studied by TG/DTA and the products derived from calcinations of the gels at different temperatures have been characterized by XRD and SEM. By heat-treatment at 650°C for 2h, PZT thin films with smooth and crack-free surface could be achieved. The thickness of each layer was 50nm. Electric properties measurement indicated that the PZT films demonstrated a ferroelectric hysteresis loop. The remanent polarization(Pr) and coercive field (Ec) were 20.7 μC/cm2 and 75.5kV/cm, respectively. The dielectric constant and the dielectric loss at 100 kHz of the films were 930 and 0.045, respectively.",
keywords = "Aqueous organic gel, EDTA, Electrical properties, PZT thin films",
author = "Zhao, \{J. P.\} and Juan, \{C. Y.\} and Qiang, \{L. S.\}",
year = "2007",
doi = "10.4028/3-908451-30-2.195",
language = "英语",
isbn = "3908451302",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
number = "PART 1",
pages = "195--200",
booktitle = "Nanoscience and Technology",
address = "瑞士",
edition = "PART 1",
note = "China International Conference on Nanoscience and Technology, ChinaNANO 2005 ; Conference date: 09-06-2005 Through 11-06-2005",
}