Preparation and characterization of TaNbTiW multi-element alloy films

Xingguo Feng; Guangze Tang; Le Gu; Xinxin Ma; Mingren Sun; Liqin Wang

doi:10.1016/j.apsusc.2012.08.030

Preparation and characterization of TaNbTiW multi-element alloy films

Xingguo Feng
, Guangze Tang
, Le Gu
, Xinxin Ma^*
, Mingren Sun
, Liqin Wang

^*Corresponding author for this work

School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of -0.1 to -2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.

Original language	English
Pages (from-to)	447-453
Number of pages	7
Journal	Applied Surface Science
Volume	261
DOIs	https://doi.org/10.1016/j.apsusc.2012.08.030
State	Published - 15 Nov 2012

Keywords

Hardness
Multi-elements alloy films
Multi-targets magnetron sputtering
Structure

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10.1016/j.apsusc.2012.08.030

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title = "Preparation and characterization of TaNbTiW multi-element alloy films",

abstract = "In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of -0.1 to -2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.",

keywords = "Hardness, Multi-elements alloy films, Multi-targets magnetron sputtering, Structure",

author = "Xingguo Feng and Guangze Tang and Le Gu and Xinxin Ma and Mingren Sun and Liqin Wang",

year = "2012",

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day = "15",

doi = "10.1016/j.apsusc.2012.08.030",

language = "英语",

volume = "261",

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T1 - Preparation and characterization of TaNbTiW multi-element alloy films

AU - Feng, Xingguo

AU - Tang, Guangze

AU - Gu, Le

AU - Ma, Xinxin

AU - Sun, Mingren

AU - Wang, Liqin

PY - 2012/11/15

Y1 - 2012/11/15

N2 - In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of -0.1 to -2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.

AB - In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of -0.1 to -2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.

KW - Hardness

KW - Multi-elements alloy films

KW - Multi-targets magnetron sputtering

KW - Structure

UR - https://www.scopus.com/pages/publications/84867746643

U2 - 10.1016/j.apsusc.2012.08.030

DO - 10.1016/j.apsusc.2012.08.030

M3 - 文章

AN - SCOPUS:84867746643

SN - 0169-4332

VL - 261

SP - 447

EP - 453

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Preparation and characterization of TaNbTiW multi-element alloy films

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Keywords

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