Preliminary investigation on nanoparticle colloid hydrodynamic cavitation jet polishing technology

To process supersmooth surface efficiently, a new supersmooth surface machining technology named nanoparticle colloid hydrodynamic cavitation jet polishing (HCJP) was presented. This technology utilized the interfacial reaction between the nanoparticles and the surface of workpiece to remove material at atomic level. Hydrodynamic cavitation was used to strengthen interfacial chemical reaction and improve machining efficiency. Plototype equipment of HCJP was researched and preliminary experiment was done. The results show that lower system pressure is good for obtaining high quality surface. In process experiment, the supersmooth optical surface whose roughness was about 1 nm on K9 glass was obtained, which proves that this technology can be widely applied to processing the device with supersmooth surface.