Abstract
XPS (X-ray Photoelectron Spectroscopy) or ESCA (Electron Spectroscopy for Chemical Analysis) can accurately measure the thickness of ultra-thin films thinner than 2 nm and its precision is ±0.1nm. XPS remedy the defection of TEM that is difficult to determine the thickness for films thinner than 1 nm, but XPS is not accurate for films thicker than 10 nm. This paper aims at reviewing the application of XPS in determining thickness of ultra-thin films.
| Original language | English |
|---|---|
| Pages (from-to) | 195-198 |
| Number of pages | 4 |
| Journal | Materials Science Forum |
| Volume | 437-438 |
| DOIs | |
| State | Published - 2003 |
| Externally published | Yes |
| Event | Proceedings of the 2nd International Conference on Advanced Materials Processing - Singapore, Singapore Duration: 2 Dec 2002 → 4 Dec 2002 |
Keywords
- Applications
- ESCA
- Thickness Measurement
- Ultra-Thin Films
- XPS
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