Practical finite-time command filtered backstepping control of MPCVD reactor systems with uncertainties

A practical finite-time command filtered backstepping control method is proposed in this paper for a microwave plasma chemical vapor deposition (MPCVD) reactor system. The MPCVD reactor system is modeled as a coupled nonlinear system with unknown control direction functions and unknown nonlinearities. To address the unknown nonlinearities, novel practical finite-time command filters are proposed to construct the estimations of such nonlinearities. On the other hand, an equivalent augmented system of the reactor system is proposed to address the design challenges that posed by the system unknown control direction functions. Additionally, it can be concluded that the proposed control method ensures practical finite-time stability of the reactor system tracking errors by using the practical finite-time Lyapunov stability criterion. Finally, the effectiveness of the approach is demonstrated through the simulation results.