Position error correction in absolute surface measurement based on a multi-angle averaging method

We present a method for position error correction in absolute surface measurement based on a multi-angle averaging method. Differences in shear rotation measurements at overlapping areas can be used to estimate the unknown relative position errors of the measurements. The model and the solving of the estimation algorithm have been discussed in detail. The estimation algorithm adopts a least-squares technique to eliminate azimuthal errors caused by rotation inaccuracy. The cost functions can be minimized to determine the true values of the unknowns of Zernike polynomial coefficients and rotation angle. Experimental results show the validity of the method proposed.